Multi-coefficient eigenmode operation—breaking through 10°/h open-loop bias instability in wideband aluminum nitride piezoelectric BAW gyroscopes

PDF] 100K Q-factor toroidal ring gyroscope implemented in wafer-level epitaxial silicon encapsulation process

Multi-coefficient eigenmode operation—breaking through 10°/h open-loop bias instability in wideband aluminum nitride piezoelectric BAW gyroscopes

Allan deviation plot for SD-BAW gyroscope interfaced with customized

PDF) Multi-coefficient eigenmode operation—breaking through 10°/h open-loop bias instability in wideband aluminum nitride piezoelectric BAW gyroscopes

SEM images of the annulus piezoelectric resonant gyroscope fabricated

Anisotropically wet-etched gyroscope geometry and mode shapes. (a)

A 0.82 μVrms ultralow 1/f noise bandgap reference for a MEMS gyroscope

Zhenming Liu's research works Georgia Institute of Technology, Georgia (GT) and other places

SED distribution of the second elliptical in-plane mode of a

The development of micromachined gyroscope structure and circuitry technology. - Abstract - Europe PMC

a) The schematic for multi-coefficient eigenmode operation circuitry

Resonant pitch and roll silicon gyroscopes with sub-micron-gap slanted electrodes: Breaking the barrier toward high-performance monolithic inertial measurement units

a) Electrode configuration for the SD-BAW gyroscope. (b) Simulated